| 000 | 00462nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 221105s9999 xx 000 0 und d | ||
| 020 | _a007048709X | ||
| 041 | _aEnglish | ||
| 082 | _a621.381 | ||
| 082 | _bTAI | ||
| 100 | _aTAI-RAN HSU | ||
| 245 | 0 | _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE | |
| 260 | _bTATA MCGRAW-HILL PUBLISHING COMPANY LIMITED | ||
| 260 | _c2002 | ||
| 300 | _a436 | ||
| 650 | _aELECTRONICS | ||
| 650 | _bGENERAL | ||
| 942 | _cBK | ||
| 999 |
_c9161 _d9161 |
||