000 00441nam a2200193Ia 4500
008 221105s9999 xx 000 0 und d
020 _a3540606580
041 _aENGLISH
082 _a621 FAT
082 _bFAT
100 _aFATIKOW S; REMBOLD U
245 0 _aMICROSYSTEM TECHNOLOGY AND MICROROBOTICS
250 _a-
260 _bSPRINGER.
260 _c1960
300 _a408 p.
650 _aMECHANICAL ENGINEERING
942 _cBK
999 _c6183
_d6183