000 00257nam a22000977a 4500
245 _aIEEE JOURNAL OF MICROELECTRO MECHANICAL SYSTEM
260 _aNEW YORK
_bIEEE
_c2005
650 _aMICROELECTRO MECHANICAL SYSTEM
942 _cBV
952 _IFEB 2005 : APR2005
999 _c47184
_d47184