000 00264nam a22001097a 4500
100 _aIIT MADRAS
245 _aETCHING OF SI, S102, SI N AND OTHER MATERIALS
260 _bIIT MADRAS
_c2002
650 _aETCHING OFFSET S102 SI N
700 _aIIT MADRAS
942 _cCD
999 _c45081
_d45081