000 00292nam a22001097a 4500
100 _aNANDITA GUPTA IIT MADRAS
245 _aMOFSET - I METAL GATE VS SELF ALAIGNED POLYGATE
260 _bIIT MADRAS
_c2002
650 _aMOFSET POLYGATE METAL
700 _aNANDITA GUPTA IIT MADRAS
942 _cCD
999 _c44973
_d44973