000 00302nam a22001097a 4500
100 _aNANDITA GUPTA IIT MADRAS
245 _aPROBLEMS IN LOCAS + TRENCH ISOLATION AND SELECTION EPITAXY
260 _bIIT MADRAS
_c2002
650 _aLOCAS TRENCH EPITAXY
700 _aNANDITA GUPTA IIT MADRAS
942 _cCD
999 _c44970
_d44970