000 00256nam a22001097a 4500
100 _aNANDIDAS GUPTA IIT MADRAS
245 _aPLASMA DEPOSITION PROCESS
260 _bIT MADRAS
_c2002
650 _aPLASMA
700 _aNANDIDAS GUPTA IIT MADRAS
942 _cCD
999 _c44966
_d44966