000 00273nam a22001097a 4500
100 _aNANDIDAS GUPTA IIT MADRAS
245 _aVLSI DESIGN PLASMA ETCHING SYSTEMS
260 _bIIT MADRAS
_c2002
650 _aPLASMA ETCHING
700 _aNANDIDAS GUPTA IIT MADRAS
942 _cCD
999 _c44965
_d44965