000 00270nam a22001097a 4500
100 _aNANDIDAS GUPTA IIT MADRAS
245 _aBASIC VLSI DESIGN DRY ETCHING
260 _bIT MADRAS
_c2002
650 _aVLSI DRY ETCHING
700 _aNANDIDAS GUPTA IIT MADRAS
942 _cCD
999 _c44963
_d44963