000 00284nam a22001097a 4500
100 _aNANDITAS GUPTA IIT MADRAS
245 _aBASIC VLSI DESIGN WET CHEMICAL ETCHING
260 _bIIT MADRAS
_c2002
650 _aVLSI CHEMICAL ETCHING
700 _aNANDITAS GUPTA IIT MADRAS
942 _cCD
999 _c44962
_d44962