000 | 00314nam a22001097a 4500 | ||
---|---|---|---|
100 | _aNANDITAS GUPTA IIT MADRAS | ||
245 | _aMARKING DURING IMPLANTATION CHARACTERIZATION OF DOPED LAYERS | ||
260 |
_bIIT MADRAS _c2002 |
||
650 | _aDOPED LAYERS CHARACTERIZATION | ||
700 | _aNANDITAS GUPTA IIT MADRAS | ||
942 | _cCD | ||
999 |
_c44958 _d44958 |