000 00314nam a22001097a 4500
100 _aNANDITAS GUPTA IIT MADRAS
245 _aMARKING DURING IMPLANTATION CHARACTERIZATION OF DOPED LAYERS
260 _bIIT MADRAS
_c2002
650 _aDOPED LAYERS CHARACTERIZATION
700 _aNANDITAS GUPTA IIT MADRAS
942 _cCD
999 _c44958
_d44958