000 00282nam a22001097a 4500
100 _aNANDITAS GUPTA IIT MADRAS
245 _aANNEALING OF DAMAGES CREATED BY ION-IMPLANTATION
260 _bIIT MADRAS
_c2002
650 _aANNEALING
700 _aNANDITAS GUPTA IIT MADRAS
942 _cCD
999 _c44956
_d44956