| 000 | 00317nam a22001097a 4500 | ||
|---|---|---|---|
| 100 | _aNANDITAS GUPTA IIT MADRAS | ||
| 245 | _aDIFFUSION IV - DIFFUSION SYSTEMS COMPARISION WITH ION-IMPLANTATION | ||
| 260 |
_bIIT MADRAS _c2002 |
||
| 650 | _aION IMPLANTATION DIFFUSION | ||
| 700 | _aNANDITAS GUPTA IIT MADRAS | ||
| 942 | _cCD | ||
| 999 |
_c44951 _d44951 |
||