000 00232nam a22000977a 4500
245 _aIEEE/ASME TRANSACTIONS ON MEECHATORNICS
260 _aNEWYORK
_bIEEE
_c2001
650 _aMICROMACHINED
942 _cBV
952 _IMAR 2001 : SEP 2001
999 _c43280
_d43280