000 00459nam a2200193 4500
003 SKCET
005 20230821180604.0
008 230821b |||||||| |||| 00| 0 eng d
020 _a9780070487093
040 _a1
082 _a621.381
100 _aTAI-RAN HSU
245 _aMEMS AND MICROSYSTEMS: DESIGN AND MANUFACTURE
260 _bMCGRAW HILL
_c2015
300 _a436
650 _aMECHANICAL
700 _aTAI-RAN HSU
942 _2ddc
_n0
_cBK
999 _c41518
_d41518