| 000 | 00459nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 221105s9999 xx 000 0 und d | ||
| 020 | _a9788132206637 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.381 ADA | ||
| 082 | _bTHO | ||
| 100 | _aTHOMAS M ADAMS; RICHARD A LAYTON | ||
| 245 | 0 | _aINTRODUCTORY MEMS : FABRICATION AND APPLICATIONS | |
| 250 | _a- | ||
| 260 | _bSPRINGER. | ||
| 260 | _c2014 | ||
| 300 | _a444 p. | ||
| 650 | _aELECTRONICS | ||
| 942 | _cBK | ||
| 999 |
_c37012 _d37012 |
||