000 00438nam a2200193Ia 4500
008 221105s9999 xx 000 0 und d
020 _a9.78818E+12
041 _aENGLISH
082 _a530 SAN
082 _bHEC
100 _aHECTOR J DE LOS SANTOS
245 0 _aPRINCIPLES AND APPLICATION OF NANO MEMS PHYSICS
250 _a-
260 _bSPRINGER.
260 _c2008
300 _a254 p.
650 _aPHYSICS
942 _cBK
999 _c35317
_d35317