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| 008 | 221105s9999 xx 000 0 und d | ||
| 020 | _a9788131764756 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.381 LIU | ||
| 082 | _bCHA | ||
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| 245 | 0 | _aFOUNDATIONS OF MEMS | |
| 250 | _a2 | ||
| 260 | _bPEARSON. | ||
| 260 | _c2012 | ||
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| 650 | _aELECTRONICS | ||
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_c31681 _d31681 |
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