| 000 | 00480nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 221105s9999 xx 000 0 und d | ||
| 020 | _a9788179928998 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.395 HEL | ||
| 082 | _bJOH | ||
| 100 | _aJOHN N HELBERT. | ||
| 245 | 0 | _aHANDBOOK OF VLSI MICROLITHOGRAPHY : PRINCIPLES, TOOLS, TECHNOLOGY AND APPLICATIONS | |
| 250 | _a- | ||
| 260 | _bJAICO BOOKS | ||
| 260 | _c2009 | ||
| 300 | _a1001 p. | ||
| 650 | _aVLSI DESIGN | ||
| 942 | _cREF | ||
| 999 |
_c26675 _d26675 |
||