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| 020 | _a0470851066 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.3 | ||
| 082 | _bSAM | ||
| 100 | _aSAMI FRANSSILA | ||
| 245 | 0 | _aINTRODUCTIION TO MICROFABRICATION | |
| 260 | _bJOHN WILEY AND SONS INC | ||
| 260 | _c2004 | ||
| 300 | _a401 | ||
| 650 | _aELECTRICAL | ||
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||