000 00446nam a2200181Ia 4500
008 221105s9999 xx 000 0 und d
020 _a0122476905
041 _aENGLISH
082 _a621.38152
082 _bRIC
100 _aRICHARD B FAIR
245 0 _aRAPID THERMAL PROCESSING : SCIENCE AND TECHNOLOGY
260 _bACADEMIC PRESS INC
260 _c1993
300 _a430
650 _aELECTRONIC DEVICES AND CIRCUITS
942 _cREF
999 _c16049
_d16049