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|---|---|---|---|
| 008 | 221105s9999 xx 000 0 und d | ||
| 020 | _a3540642137 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.38152 | ||
| 082 | _bKLA | ||
| 100 | _aKLAUS GRAFF | ||
| 245 | 0 | _aMETAL IMPURITIES IN SILICON-DEVICE FABRICATION | |
| 260 | _bSPRINGER | ||
| 260 | _c2000 | ||
| 300 | _a268 | ||
| 650 | _aGENERAL | ||
| 942 | _cREF | ||
| 999 |
_c16006 _d16006 |
||