TAI-RAN HSU <br/><br/>
MEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE 

 -  TATA MCGRAW-HILL PUBLISHING COMPANY LIMITED  2002 
 - 436 
<br/><br/><label>ISBN: </label>007048709X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS GENERAL 
<br/><br/><label>Dewey Class. No.: </label>621.381  / TAI