NADIM MALUF; KIRT WILLIAMS <br/><br/>
AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING 

 - 2 
 -  ARTECH HOUSE  2004 
 - 283 p. 
<br/><br/><label>ISBN: </label>1580535909 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL  / NAD