FATIKOW S; REMBOLD U <br/><br/>
MICROSYSTEM TECHNOLOGY AND MICROROBOTICS 

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 -  SPRINGER.  1960 
 - 408 p. 
<br/><br/><label>ISBN: </label>3540606580 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621 FAT  / FAT