TY  - BOOK
AU  - NANDITA GUPTA IIT MADRAS
AU  - NANDITA GUPTA IIT MADRAS
TI  - PROBLEMS IN LOCAS  + TRENCH ISOLATION AND SELECTION EPITAXY
PY  - 2002///
PB  - IIT MADRAS
KW  - LOCAS TRENCH EPITAXY
ER  -