TY  - BOOK
AU  - TAI-RAN HSU 
AU  - TAI-RAN HSU 
TI  - MEMS AND MICROSYSTEMS: DESIGN AND MANUFACTURE
SN  - 9780070487093    
U1  - 621.381 
PY  - 2015///
PB  - MCGRAW HILL
KW  - MECHANICAL
ER  -