TAI-RAN HSU  <br/><br/>
MEMS AND MICROSYSTEMS: DESIGN AND MANUFACTURE 

 -  MCGRAW HILL  2015 
 - 436 
<br/><br/><label>ISBN: </label>9780070487093     
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL
<br/><br/><label>Dewey Class. No.: </label>621.381