JAMES J ALLEN <br/><br/>
MICRO ELECTRO MECHANICAL SYSTEM DESIGN 

 - 
 -  CRC PRESS.  2015 
 - 465 p. 
<br/><br/><label>ISBN: </label>9780824758240 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL
<br/><br/><label>Dewey Class. No.: </label>621 ALL  / JAM