TAI-RAN HSU. <br/><br/>
MEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE 

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 -  TATA MCGRAW HILL EDUCATION PRIVATE LIMITED.  2012 
 - 436 p. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTRONIC
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU  / TAI