CHANG LIU <br/><br/>
FOUNDATIONS OF MEMS 

 - 2 
 -  PEARSON.  2012 
 - 576 p. 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.381 LIU  / CHA