JOHN N HELBERT <br/><br/>
HANDBOOK OF VLSI MICROLITHOGRAPHY : PRINCIPLES, TOOLS, TECHNOLOGY AND APPLICATIONS 

 -  JAICO PUBLISHING HOUSE  2005 
 - 1001 
<br/><br/><label>ISBN: </label>8179924750 
<br/><br/><label>Subjects--Topical Terms: </label><br/>COMMUNICATION
<br/><br/><label>Dewey Class. No.: </label>621.395  / JOH